Apparatus for generating quasi-free-space microwave-driven plasmas
| Autor: | Sabrina S. Maestas, P. David Lepell, Brad W. Hoff, Julie E. Lawrance, David M. French, Remington Reid |
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| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Materials science Argon business.industry chemistry.chemical_element 02 engineering and technology Plasma 021001 nanoscience & nanotechnology 01 natural sciences law.invention Volumetric flow rate Lens (optics) Optics chemistry Physics::Plasma Physics law Torr 0103 physical sciences Vacuum chamber 0210 nano-technology business Instrumentation Beam (structure) Microwave |
| Zdroj: | The Review of scientific instruments. 87(3) |
| ISSN: | 1089-7623 |
| Popis: | An apparatus for generating quasi-free-space microwave-driven plasmas has been designed, constructed, and tested. The plasma is driven by a multi-kW, ∼5 GHz microwave beam focused at the center of a vacuum chamber using a Koch-type metal plate lens. Sustained plasma discharges have been generated in argon at pressures ranging from 150 to 200 mTorr, at beam power levels ranging from 5 to 10 kW, and at gas flow rates of approximately 200 SCCM. |
| Databáze: | OpenAIRE |
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