Specimen preparation for high-resolution transmission electron microscopy using focused ion beam and Ar ion milling
| Autor: | T. Muroga, Hirokazu Sasaki, Takeyoshi Matsuda, Yuh Shiohara, Tsukasa Hirayama, Fusako Iwase, Teruo Izumi, Takashi Saitoh, Takeharu Kato, Yutaka Yamada, Yasuhiro Iijima |
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| Rok vydání: | 2004 |
| Předmět: |
Materials science
Ion beam Analytical chemistry Acceleration voltage Focused ion beam Specimen Handling Ion beam deposition Microscopy Electron Transmission Transmission electron microscopy visual_art visual_art.visual_art_medium Ceramic Argon Ion milling machine Composite material High-resolution transmission electron microscopy Instrumentation |
| Zdroj: | Journal of Electron Microscopy. 53:497-500 |
| ISSN: | 1477-9986 0022-0744 |
| DOI: | 10.1093/jmicro/dfh067 |
| Popis: | We have developed a focused ion beam (FIB)-Ar ion-milling technique for high-resolution transmission electron microscopy. A micrometresized specimen was mounted on a cross section of metal foil of a few micrometres thick, using FIB microsampling. Following this, a 2 degrees wedgeshaped part was made in the specimen using FIB. Finally, the specimen was milled using an Ar ion beam to remove the FIB-damaged layers. We applied the FIB-Ar ion milling technique to a CeO(2)/Gd(2)Zr(2)O(7) multilayer specimen, resulting in the crystal lattice fringes of both layers being clearly observable in comparison to a specimen finished using a Ga ion beam at an accelerating voltage of 10 kV. |
| Databáze: | OpenAIRE |
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