Design and test of resonators using PiezoMUMPS technology
| Autor: | Orla Feely, Joan Pons-Nin, Sergi Gorreta, Elena Blokhina, Diarmuid O'Connell, Manuel Dominguez |
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| Přispěvatelé: | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica, Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
| Předmět: |
Materials science
Piezo-MEMS Process (computing) MEMS resonators Integrated circuits Enginyeria electrònica::Microelectrònica::Circuits integrats [Àrees temàtiques de la UPC] Finite element method Computer Science::Other Vibration Resonator Mechanical vibration Piezoelectric mems Electronic engineering Circuits integrats Mechanical modes |
| Zdroj: | Recercat. Dipósit de la Recerca de Catalunya instname UPCommons. Portal del coneixement obert de la UPC Universitat Politècnica de Catalunya (UPC) |
| Popis: | © 2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes,creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. This paper presents preliminary results obtained with devices fabricated with the new PiezoMUMPS process. Since these devices will be used as resonators in applications based on Pulsed Digital Oscillators, we analyze, both with simulations and measurements, the mechanical vibration modes that can be excited and detected. We also introduce a specific version of PDO for piezoelectric MEMS. |
| Databáze: | OpenAIRE |
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