Thermal Marangoni-driven Dynamics of Spinning Liquid Films
Autor: | Joshua A. Dijksman, Thomas P. Witelski, Robert Behringer, Shomeek Mukhopadhyay |
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Rok vydání: | 2018 |
Předmět: |
Materials science
Computational Mechanics Disjoining pressure FOS: Physical sciences 01 natural sciences 010305 fluids & plasmas Surface tension Physics::Fluid Dynamics Condensed Matter::Materials Science 0103 physical sciences Life Science Thin film 010306 general physics VLAG Fluid Flow and Transfer Processes Spin coating Steady state Marangoni effect Condensed matter physics Fluid Dynamics (physics.flu-dyn) Marangoni number Physics - Fluid Dynamics Condensed Matter::Soft Condensed Matter Temperature gradient Modeling and Simulation Physical Chemistry and Soft Matter |
Zdroj: | Physical Review Fluids 4 (2019) 8 Physical Review Fluids, 4(8) |
ISSN: | 2469-990X |
DOI: | 10.48550/arxiv.1806.10595 |
Popis: | Spin coating of thin films of viscous liquids on a rotating substrate is a core technological component of semiconductor microchip fabrication. The thinning dynamics is influenced by many physical processes. Specifically temperature gradients affect thin liquid films through their influence on the local fluid surface tension. We show here experimentally and numerically that adding a static temperature gradient has a significant effect on the equilibrium film thickness and height profile reached in spin coating. Our results suggest that thermal gradients can be used to control film height profile dynamics. Comment: 13 pages, 10 figures |
Databáze: | OpenAIRE |
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