INTERFACIAL DEFECTS IN GaAs/Si AFTER ANNEALING

Autor: B. Bartenlian, André Rocher, J. Chazelas, M.-N. Charasse
Jazyk: angličtina
Rok vydání: 1990
Předmět:
Zdroj: Journal de Physique Colloques
Journal de Physique Colloques, 1990, 51 (C1), pp.C1-915-C1-920. ⟨10.1051/jphyscol:19901144⟩
DOI: 10.1051/jphyscol:19901144⟩
Popis: The threading defects involved in the GaAs/Si heterostructure have been studied in as-grown and annealed specimens. Their origin is related to the imperfections of the interface : impurities, roughness and discontinuities of misfit dislocation network. Large parts of the GaAs layer are almost free of stress in the annealed specimen. Residual stresses and defects are located at the boundaries between the Lomer dislocation arrays. Small antiphase domains are also observed.
Databáze: OpenAIRE