Synthesis of ZnO Nanorod Film Deposited by Spraying with Application for Flexible Piezoelectric Energy Harvesting Microdevices

Autor:	Arxel de León, Ernesto Hernández-Hernández, Agustín L. Herrera-May, Antonio Ledezma-Pérez, Víctor A. Jarvio-Cordova, Jorge Romero-García, Ernesto A. Elvira-Hernández, Gilberto Hurtado, Carlos Gallardo-Vega, Luis A. Uscanga-González
Rok vydání:	2020
Předmět:	Materials science Fabrication Letter ZnO nanorods 02 engineering and technology Substrate (electronics) lcsh:Chemical technology 010402 general chemistry 01 natural sciences Biochemistry piezoelectric films Analytical Chemistry Nanomaterials chemistry.chemical_compound Polyethylene terephthalate lcsh:TP1-1185 Electrical and Electronic Engineering Instrumentation business.industry 021001 nanoscience & nanotechnology Piezoelectricity Atomic and Molecular Physics and Optics 0104 chemical sciences flexible substrate solvothermal method chemistry energy harvesting device Transmission electron microscopy Optoelectronics Nanorod 0210 nano-technology business Energy harvesting
Zdroj:	Sensors (Basel, Switzerland) Sensors, Vol 20, Iss 6759, p 6759 (2020)
ISSN:	1424-8220
Popis:	Industry 4.0 and the Internet of Things have significantly increased the use of sensors and electronic products based on flexible substrates, which require electrical energy for their performance. This electrical energy can be supplied by piezoelectric vibrational energy harvesting (pVEH) devices. These devices can convert energy from ambient mechanical excitations into electrical energy. In order to develop, these devices require piezoelectric films fabricated with a simple and low-cost process. In this work, we synthesize ZnO nanorod film by a solvothermal method and deposit by spraying on ITO (indium-tin-oxide)/PET (polyethylene terephthalate) flexible substrate for a pVEH microdevice. The results of the characterization of the ZnO nanorod film using X-ray diffraction (XRD) confirm the typical reflections for this type of nanomaterial (JCPDS 36-145). Based on transmission electron microscopy (TEM) images, the size of the nanorod film is close to 1380 nm, and the average diameter is 221 ± 67 nm. In addition, the morphological characteristics of the ZnO nanorod film are obtained using atomic force microscopy (AFM) tapping images. The pVEH microdevice has a resonant frequency of 37 Hz, a generated voltage and electrical power of 9.12 V and 6.67 μW, respectively, considering a load resistance of 107.7 kΩ and acceleration of 1.5 g. The ZnO nanorod film may be applied to pVEH microdevices with flexible substrates using a low-cost and easy fabrication process.
Databáze:	OpenAIRE
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