New Approach for Improvement of Secondary Ion Mass Spectrometry Profile Analysis
| Autor: | Djamel Benatia, Ahmed El Oualkadi, Tahar Kezai, M'hamed Boulakroune |
|---|---|
| Přispěvatelé: | Université Catholique de Louvain = Catholic University of Louvain (UCL), Université Hadj Lakhdar Batna 1 |
| Rok vydání: | 2007 |
| Předmět: |
010302 applied physics
Physics and Astronomy (miscellaneous) Resolution (mass spectrometry) Silicon Chemistry media_common.quotation_subject General Engineering Analytical chemistry General Physics and Astronomy chemistry.chemical_element 02 engineering and technology 021001 nanoscience & nanotechnology Residual 01 natural sciences Molecular physics Asymmetry Secondary ion mass spectrometry 0103 physical sciences Deconvolution [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics 0210 nano-technology Noise (radio) Shrinkage media_common |
| Zdroj: | Japanese Journal of Applied Physics Japanese Journal of Applied Physics, Japan Society of Applied Physics, 2007, 46 (11), pp.7441-7445. ⟨10.1143/JJAP.46.7441⟩ |
| ISSN: | 1347-4065 0021-4922 |
| DOI: | 10.1143/jjap.46.7441 |
| Popis: | International audience; In this paper, we describe the improvement of secondary ion mass spectrometry (SIMS) profile analysis by a new approach based on partial deconvolution combined with scale-frequency shrinkage. The SIMS profiles are obtained by analysis of the delta layers of boron doped silicon in a silicon matrix, analyzed using Cameca-Ims6f at oblique incidence. These profiles can be approximated closely by exponential-like tail distributions with decay length, which characterizes the collisional mixing effect. The partial deconvolution removes the residual ion mixing effect. The contributions of high-frequency noise are removed by shrinkage to a great extent of the profiles. It is shown that this approach leads to a marked improvement in depth resolution without producing artifacts and aberrations caused principally by noise. Furthermore, it is shown that the asymmetry of the delta layers, caused by the collisional mixing effect, is completely removed, the decay length is decreased by a factor of 4 compared with that before deconvolution. |
| Databáze: | OpenAIRE |
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