A Comparative Study of Iron-Based Film Deposition from Iron Pentacarbonyl at 248 nm and 488 nm
| Autor: | Dan C. Dumitras, Ion Morjan, Ion N. Voicu, Rodica Alexandrescu, R. Cireasa, A. Pogorelyi, A. Andrei, S.A. Mulenko |
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| Rok vydání: | 1995 |
| Předmět: |
010302 applied physics
business.industry Chemistry Diffusion Nucleation Analytical chemistry General Physics and Astronomy 01 natural sciences Iron pentacarbonyl 010309 optics chemistry.chemical_compound Optics X-ray photoelectron spectroscopy [PHYS.HIST]Physics [physics]/Physics archives 0103 physical sciences Irradiation Thin film business Quartz Deposition (law) |
| Zdroj: | Journal de Physique IV Proceedings Journal de Physique IV Proceedings, EDP Sciences, 1995, 05 (C5), pp.C5-679-C5-686. ⟨10.1051/jphyscol:1995581⟩ |
| ISSN: | 1155-4339 1764-7177 |
| DOI: | 10.1051/jphyscol:1995581 |
| Popis: | Thin film deposition by laser irradiation of Fe(CO) 5 at two radiation wavelengths (248 nm and 488 nm) was performed. A perpendicular geometry of irradiation was used. Maximum deposition rates of 14 A/s at λ = 248 nm and 1.5 A/s at λ = 488 nm were obtained, indicating a diffusion limited process. SEM analysis of film morphologies showed significant differencies in the nucleation and growth of films deposited at 248 nm and 488 nm. XPS surface analysis revealed a higher carbon content and carbidic phases in the surface of films deposited at 488 nm on SiO 2 (quartz) substrates. Oxidized surface Fe phases were found in films, with increasing the exposure time to laser radiation. The film properties are discussed in connection with irradiation conditions and specific mechanisms involved. |
| Databáze: | OpenAIRE |
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