Optimization Of PVDF-TrFE Processing Conditions For The Fabrication Of Organic MEMS Resonators
| Autor: | Pierre-Henri Ducrot, Isabelle Dufour, Cédric Ayela |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Předmět: |
Microelectromechanical systems
Multidisciplinary Fabrication Materials science business.industry Annealing (metallurgy) Poling 02 engineering and technology 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences Piezoelectricity Data science Article 0104 chemical sciences Resonator Transducer Optoelectronics Thin film 0210 nano-technology business |
| Zdroj: | Scientific Reports |
| ISSN: | 2045-2322 |
| DOI: | 10.1038/srep19426 |
| Popis: | This paper reports a systematic optimization of processing conditions of PVDF-TrFE piezoelectric thin films, used as integrated transducers in organic MEMS resonators. Indeed, despite data on electromechanical properties of PVDF found in the literature, optimized processing conditions that lead to these properties remain only partially described. In this work, a rigorous optimization of parameters enabling state-of-the-art piezoelectric properties of PVDF-TrFE thin films has been performed via the evaluation of the actuation performance of MEMS resonators. Conditions such as annealing duration, poling field and poling duration have been optimized and repeatability of the process has been demonstrated. |
| Databáze: | OpenAIRE |
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