A versatile direct laser writing lithography technique for surface enhanced infra-red spectroscopy sensors

Autor: Avi Braun, Stefan A. Maier
Přispěvatelé: The Royal Society, Engineering & Physical Science Research Council (E
Rok vydání: 2016
Předmět:
Fabrication
Materials science
plasmonic sensors
Chemistry
Multidisciplinary
FABRICATION
Bioengineering
Nanotechnology
02 engineering and technology
010402 general chemistry
01 natural sciences
Interference lithography
law.invention
law
METAMATERIALS
HIGH-THROUGHPUT NANOFABRICATION
Nanoscience & Nanotechnology
INTERFERENCE LITHOGRAPHY
Instrumentation
Lithography
SEIRA
Plasmon
Fluid Flow and Transfer Processes
Science & Technology
business.industry
chemical detection
Process Chemistry and Technology
Metamaterial
021001 nanoscience & nanotechnology
Laser
ABSORPTION SEIRA
0104 chemical sciences
direct laser writing
PLASMONICS
Chemistry
Nanolithography
Physical Sciences
NANOANTENNA ARRAYS
Optoelectronics
Science & Technology - Other Topics
nanofabrication
0210 nano-technology
business
Electron-beam lithography
Popis: A challenge for design, testing, and fabrication of nanostructured chemical sensors is the fabrication of mm2 size arrays of nanostructures in a reasonable time. Herein, we introduce and show how direct laser writing (DLW) in positive-tone photoresists, followed by lift-off process, can be used for fast fabrication (up to three times faster than a comparable electron beam lithography system) of arrays of nanoscale plasmonic structures with a great level of control over the design and dimensions of the nanostructures. We demonstrate the function of nanostructured arrays, fabricated by various DLW approaches, with surface enhanced infrared absorption (SEIRA) detection of nine vibrational modes of PMMA. We also discuss the tunability of the plasmonic resonance—and hence the spectral detection range—by alteration of the size and array parameters of the nanostructures, and demonstrate the flexibility of this fabrication method by showing devices made of various substrate and antenna materials.
Databáze: OpenAIRE
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