SU-8 as a Material for Microfabricated Particle Physics Detectors
| Autor: | Alessandro Mapelli, Pietro Maoddi, Sébastien Jiguet, Philippe Renaud |
|---|---|
| Rok vydání: | 2014 |
| Předmět: |
Particle physics
Fabrication Physics::Instrumentation and Detectors lcsh:Mechanical engineering and machinery scintillation detectors Microfluidics microfluidics Nanotechnology microfluidic scintillation detectors lcsh:TJ1-1570 Detectors and Experimental Techniques Electrical and Electronic Engineering micropattern gaseous detectors Physics Scintillation Mechanical Engineering Detector Process (computing) MicroMegas detector Time resolution particle detectors SU-8 Control and Systems Engineering Particle High Energy Physics::Experiment Micromegas |
| Zdroj: | Micromachines, Vol 5, Iss 3, Pp 594-606 (2014) |
| ISSN: | 2072-666X |
| DOI: | 10.3390/mi5030594 |
| Popis: | Several recent detector te chnologies developed for particle physics applications are based on microfabricated structures. Dete ctors built with this approach generally exhibit the overall best performance in te rms of spatial and time resolution. Many properties of the SU-8 photoepoxy make it suitable for the manufacturing of microstructured particle detectors. This arti cle aims to review some emerging detector technologies making use of SU-8 microstructu ring, namely micropatte rn gaseous detectors and microfluidic scintillation detectors. Th e general working principle and main process steps for the fabrication of each device are reported, with a focus on the advantages brought to the device functionality by the us e of SU-8. A novel process based on multiple bonding steps for the fabrication of thin multila yer microfluidic scin tillation detectors developed by the authors is presented. Finally, a brief overview of the applications for the discussed devices is given. |
| Databáze: | OpenAIRE |
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