Ultrathin, sputter-deposited, amorphous alloy films of ruthenium and molybdenum
| Autor: | Görsel Yetik, Alessandro Troglia, Saeedeh Farokhipoor, Stefan van Vliet, Jamo Momand, Bart J. Kooi, Roland Bliem, Joost W.M. Frenken |
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| Přispěvatelé: | ARCNL (WZI, IoP, FNWI), ITFA (IoP, FNWI), Nanostructures of Functional Oxides, Nanostructured Materials and Interfaces, Surfaces and Thin Films |
| Jazyk: | angličtina |
| Rok vydání: | 2022 |
| Předmět: |
Molybdenum
Condensed Matter - Materials Science Condensed Matter - Mesoscale and Nanoscale Physics Metal alloys Materials Science (cond-mat.mtrl-sci) FOS: Physical sciences Surfaces and Interfaces General Chemistry Condensed Matter Physics Ruthenium Surfaces Coatings and Films Ultrathin films Amorphous materials Surface roughness Mesoscale and Nanoscale Physics (cond-mat.mes-hall) Materials Chemistry Sputter deposition |
| Zdroj: | Surface and Coatings Technology, 445:128729. Elsevier Surface and Coatings Technology, 445:128729. Elsevier Science |
| ISSN: | 0257-8972 |
| Popis: | Microscopy and diffraction measurements are presented of ultrathin binary alloy films of ruthenium and molybdenum that are obtained by standard sputter deposition. For compositions close to Ru50Mo50, we find the films to be amorphous. The amorphicity of the films is accompanied by a significant reduction of the roughness with respect to the roughness of equally thick films of either ruthenium or molybdenum. We ascribe this to the absence of the grain structure that is characteristic of the polycrystalline films of the separate elements. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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