Design of micro-fabricated thermal flow-rate sensor for water network monitoring
Autor: | Hugo Regina, Tarik Bourouina, Frederic Marty, William Cesar, Ferdous Shaun, Elyes Nefzaoui |
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Přispěvatelé: | ESIEE Paris, Electronique, Systèmes de communication et Microsystèmes (ESYCOM), Conservatoire National des Arts et Métiers [CNAM] (CNAM), HESAM Université - Communauté d'universités et d'établissements Hautes écoles Sorbonne Arts et métiers université (HESAM)-HESAM Université - Communauté d'universités et d'établissements Hautes écoles Sorbonne Arts et métiers université (HESAM)-Université Paris-Est Marne-la-Vallée (UPEM)-ESIEE Paris |
Jazyk: | angličtina |
Rok vydání: | 2017 |
Předmět: |
Materials science
Silicon chemistry.chemical_element Water Network Monitoring 02 engineering and technology Substrate (electronics) 01 natural sciences Temperature measurement law.invention law Thermal Electronic engineering [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det] [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics Sensor Microelectromechanical systems business.industry 010401 analytical chemistry Flow-rate 021001 nanoscience & nanotechnology Finite element method 0104 chemical sciences Volumetric flow rate MEMS chemistry Thermal sensor Optoelectronics Resistor 0210 nano-technology business Micromachined sensor |
Zdroj: | 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) 19th Symposium on Design, Test, Integration & Packaging of MEMS and MOEM (DTIP 2017) 19th Symposium on Design, Test, Integration & Packaging of MEMS and MOEM (DTIP 2017), May 2017, Bordeaux, France. ⟨10.1109/DTIP.2017.7984474⟩ |
DOI: | 10.1109/DTIP.2017.7984474⟩ |
Popis: | International audience; We report on micro-machined flow-rate sensors as part of autonomous multi-parameter sensing devices for water network monitoring. Three different versions of the flow-rate sensors have been designed, fabricated and experimentally characterized. Those sensors are made of identical micrometric platinum resistors deposited on two different substrates-glass and silicon with and without insulation layer. The sensors were tested under the anemometric operating scheme. They were characterized under a water velocity range from 0 to 3.68 m/s. We highlight the fact that the glass substrate device is more sensitive and less power-consuming than the silicon one under the identical operating condition, which requires further design strategies when using silicon as the substrate material. Experimental results are analyzed with respect to CFD simulations with the Finite Element Method. |
Databáze: | OpenAIRE |
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