Low-concentration detection of CO2 using suspended silicon waveguides in the mid-IR

Autor: Pen-Sheng Lin, Arne Quellmalz, Po-Han Huang, Shayan Parhizkar, Nour Negm, Stephan Suckow, Floria Ottonello-Briano, Max C. Lemme, Frank Niklaus, Kristinn B. Gylfason
Rok vydání: 2022
Zdroj: CLEO: Science and Innovations SF4O. 1
Conference on Lasers and Electro-Optics
DOI: 10.1364/cleo_si.2022.sf4o.1
Popis: We show detection of CO2 concentrations as low as 500 ppm using a suspended silicon photonic mid-IR waveguide. The performance is enabled by the low propagation loss (2.35 ± 0.25) dB/cm permitting sensing with waveguides up to 7 cm in length.
Databáze: OpenAIRE