Development of a local vacuum system for focused ion beam machining

Autor:	Wakabayashi Yuji, Ikeda Hiromichi, Masuzawa Tsuneaki, Yoshikazu Yoshida, Hikaru Yamagishi, Keigo Oguchi
Rok vydání:	2009
Předmět:	Microscopy Confocal Time Factors Materials science Vacuum Ion beam Mechanical engineering Nanotechnology Focused ion beam Nanolithography Beamline Machining Pressure Microtechnology Cylinder Head (vessel) Current (fluid) Instrumentation
Zdroj:	Review of Scientific Instruments. 80:073708
ISSN:	1089-7623 0034-6748
DOI:	10.1063/1.3186060
Popis:	A local vacuum system for focused ion beam (FIB) processing, with a workpiece set in the air, has been developed. The local vacuum apparatus had a double-wall cylinder structure, used a differential exhaust, and each cylinder was connected to a vacuum exhaust pump. When the gap between the workpiece and the apparatus was 10 microm, the pressure of beam line in the machining head achieved 2.1 x 10(-3) Pa. In addition, a visualization system was developed by visualizing the current flow out from a sample by FIB irradiation. With this system, it is possible to conduct focus adjustments of the FIB and shape recognition on a workpiece in the order of microns.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cda004dd8c880457c7824542e462d4f1 https://doi.org/10.1063/1.3186060 Zobrazit plný text záznamu