Submicrometric gratings fabrication from photosensitive organo-silica-hafnia thin films elaborated by sol–gel processing
| Autor: | Janyce Franc, Damien Jamon, Francis Vocanson, Maryline Lesage, Emilie Gamet, Vincent Barnier, Yves Jourlin |
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| Přispěvatelé: | Laboratoire des matériaux avancés (LMA), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Hubert Curien [Saint Etienne] (LHC), Institut d'Optique Graduate School (IOGS)-Université Jean Monnet [Saint-Étienne] (UJM)-Centre National de la Recherche Scientifique (CNRS), Département Mécanique physique et interfaces (MPI-ENSMSE), École des Mines de Saint-Étienne (Mines Saint-Étienne MSE), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT)-SMS, UMR 5146 - Laboratoire Claude Goux (LCG-ENSMSE), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), Laboratoire Telecom Claude Chappe (LT2C), Université Jean Monnet [Saint-Étienne] (UJM)-Ecole d'ingenieurs Telecom Saint Etienne |
| Rok vydání: | 2012 |
| Předmět: |
Materials science
02 engineering and technology 01 natural sciences Electron spectroscopy [SPI.MAT]Engineering Sciences [physics]/Materials 010309 optics X-ray photoelectron spectroscopy Photosensitivity 0103 physical sciences Materials Chemistry Fourier transform infrared spectroscopy Thin film Diffraction grating Sol-gel Thin Films biology business.industry Metals and Alloys Silica [CHIM.MATE]Chemical Sciences/Material chemistry Surfaces and Interfaces X-ray photoelectron Spectroscopy 021001 nanoscience & nanotechnology Hafnia biology.organism_classification Surfaces Coatings and Films Electronic Optical and Magnetic Materials Sol-gel Deposition Diffraction gratings Optoelectronics 0210 nano-technology business Refractive index |
| Zdroj: | Thin Solid Films Thin Solid Films, Elsevier, 2012, 520 (19), pp.6050. ⟨10.1016/j.tsf.2012.03.093⟩ |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/j.tsf.2012.03.093 |
| Popis: | International audience; The aim of this study is the elaboration of a high index sol-gel material in order to prepare submicrometric grating. The gratings were obtained after few seconds of UV exposure in one step using an organically modified silica-hafnia matrix. The chemical composition of thin films after UV and annealing treatments were studied using Fourier Transform Infrared Spectroscopy and X-Ray Photoelectron Spectroscopy. The study of optical properties revealed that the annealed films are transparent from 200 to 1000 nm and have a refractive index from 1.550 to 1.701 depending on the hafnium concentration. |
| Databáze: | OpenAIRE |
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