Viscoelasticity Assessment Using Quartz Crystal Microbalance for Accurate Loaded CMUT Modeling
| Autor: | Maxime Hery, Tony Merrien, Dominique Certon, Audren Boulme |
|---|---|
| Přispěvatelé: | GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) (GREMAN - UMR 7347), Université de Tours-Institut National des Sciences Appliquées - Centre Val de Loire (INSA CVL), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS), MODULEUS SAS, Institut National des Sciences Appliquées - Centre Val de Loire (INSA CVL), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université de Tours (UT)-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
Microelectromechanical systems
[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph] Materials science ultrasound Capacitive sensing Acoustics polymer Quartz crystal microbalance finite-difference Viscoelasticity chemistry.chemical_compound MEMS Capacitive micromachined ultrasonic transducers Parylene chemistry micromachined QCM Ultrasonic sensor [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics Electrical impedance |
| Zdroj: | 2021 IEEE International Ultrasonics Symposium (IUS) 2021 IEEE International Ultrasonics Symposium (IUS), Sep 2021, Xi'an, China. pp.1-4, ⟨10.1109/IUS52206.2021.9593399⟩ |
| DOI: | 10.1109/IUS52206.2021.9593399⟩ |
| Popis: | International audience; The main challenge with Capacitive Micromachined Ultrasonic Transducer (CMUT) probes packaging is to preserve their intrinsic performances. Indeed, careful attention should be paid to the encapsulation of CMUTs and the impact of a viscoelastic acoustic loading (e.g., polymer) on the array performance. Our group developed a Boundary Element Matrix (BEM) dedicated to the acoustic coupling computation between a viscoelastic medium and a CMUT. As a complementary work, the present study aims to set up an experimental protocol to extract viscoelastic properties of different media and use them as model data inputs. This task is performed using Quartz Crystal Microbalance (QCM) with electrical admittance measurements performed in air and in each viscoelastic medium. A complex viscosity value was obtained for vegetable oils and the tested polymer. Then, using a CMUT array, electrical impedance measurements were performed in each medium. Using the QCM extracted media properties, a very good agreement was obtained between CMUT modeling and measurements where viscoelasticity is proven to reduce inter-cell coupling effects. Full electrode loading of a highly viscous polymer overdamp the QCM resonance and highlight its first order equation limits. |
| Databáze: | OpenAIRE |
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