Fabrication of Low-Cost Microfluidic Chip for Terahertz Detection Applications

Autor: Salman Alfihed, Mark H. Bergen, Ian G. Foulds, Jonathan F. Holzman
Rok vydání: 2018
Předmět:
Zdroj: NEMS
Popis: Terahertz time-domain spectroscopy (THz-TDS) is an effective method for materials detection and identification at the macro scale, however, integration of microfluidic chips with THz spectroscopy is still needed to miniaturize this detection technology. Taking into consideration the polymer and microfabrication cost, several factors play an important role in the integration of such a technology, the optical absorption of the chip material is one of the significant factors. In this work, we study THz absorption spectra of two low-cost polymers as potential THz microfluidic chip materials, polyethylene terephthalate (PET) and ultra-high-molecular-weight polyethylene (UHMWPE). We then micro-fabricated two identical chips, one made by using PET and the other chip using UHMWPE to measure the absorption spectrum of Sylgard®184 silicone elastomer curing-agent (PDMS-CA) as a low-absorption test fluid.
Databáze: OpenAIRE