Thermal annealing using ultra-short laser pulses to improve the electrical properties of Al:ZnO thin films
| Autor: | H. Schut, D. Scorticati, Aufried Lenferink, B. Kniknie, Cees Otto, Stephan W. H. Eijt, Gerardus Richardus, Bernardus, Engelina Römer, T.C. Bor, M. Klein Gunnewiek, M.S. Dorenkamper, Dirk F. de Lange, A.J. Huis in 't Veld, W.J. Soppe, R. Mary Joy, D. M. Borsa, Andrea Illiberi |
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| Přispěvatelé: | Materials Science and Technology of Polymers, Medical Cell Biophysics |
| Jazyk: | angličtina |
| Rok vydání: | 2015 |
| Předmět: |
Electron mobility
ZnO [Al] Materials science Polymers and Plastics Annealing (metallurgy) Ultrafast laser Laser-induced defects law.invention Annealing symbols.namesake Condensed Matter::Materials Science X-ray photoelectron spectroscopy law Al:ZnO Thin film Spectroscopy TS - Technical Sciences Industrial Innovation business.industry Metals and Alloys Microstructure Laser Electronic Optical and Magnetic Materials TFT - Thin Film Technology Ceramics and Composites symbols Electrical properties Optoelectronics Nano Technology Electronics Raman spectroscopy business |
| Zdroj: | Acta Materialia, 98, 327-335 Acta materialia, 98:12296, 327-335. Elsevier |
| ISSN: | 1359-6454 |
| Popis: | Industrial-grade Al:ZnO thin films, were annealed by UV picosecond laser irradiation in argon atmosphere. A remarkable increase of both the carrier density and electron mobility was measured, while the optical properties in the 400-1000 nm range did not change significantly. We studied the microstructure of the films, in order to explain the observed macroscopical changes upon ultra-short pulsed laser annealing. The effects of the ps-laser irradiation are shown to be attributed to the formation of defects and a local atomic rearrangement on the sub-nm scale. This interpretation is rigorously based on the cross-referenced analysis of different experimental techniques (i.e. SEM, AFM, positron annihilation, optical spectroscopy, Hall measurements, Raman spectroscopy, XPS and XRD). The results of this study can be used to develop a new, viable, technological processing technique to further improve Al:ZnO electrodes. Cop. 2015 Acta Materialia Inc. |
| Databáze: | OpenAIRE |
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