An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements
| Autor: | Nicolas Clement, Tuami Lasri, Kamel Haddadi, Didier Theron, Bernard Legrand, Thomas Dargent, Damien Ducatteau, Hassan Tanbakuchi |
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| Přispěvatelé: | Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Agilent Technologies, The Agilent Program for University Research supported this work from 2009 to 2011. The authors would like to acknowledge the IEMN cleanroom and electrical characterization staff for their constant support. The Region Nord-Pas-de-Calais supported this project under the CPER CIA research project as well as the National Research Agency (ANR) under the programme Equipex (EXCELSIOR project)., ANR-11-EQPX-0015,Excelsior,Centre expérimental pour l'étude des propriétés des nanodispositifs dans un large spectre du DC au moyen Infra-rouge.(2011) |
| Jazyk: | angličtina |
| Rok vydání: | 2013 |
| Předmět: |
Parasitic capacitance
Microscope 02 engineering and technology Interference (wave propagation) Electrical characterization Nanotechnology applications law.invention Atomic force microscopy Optics law Microscopy 0202 electrical engineering electronic engineering information engineering Calibration Vector network analyzer Finite-element analysis [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det] [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics Instrumentation Electrical impedance Spectroscopy Physics [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] business.industry Astrophysics::Instrumentation and Methods for Astrophysics 020206 networking & telecommunications 021001 nanoscience & nanotechnology Capacitor Interferometry Nanoparticles 0210 nano-technology business MOS devices Microwave |
| Zdroj: | Review of Scientific Instruments Review of Scientific Instruments, American Institute of Physics, 2013, 84, 123705, 7 p. ⟨10.1063/1.4848995⟩ Review of Scientific Instruments, 2013, 84 (12), pp.123705. ⟨10.1063/1.4848995⟩ |
| ISSN: | 0034-6748 1089-7623 |
| DOI: | 10.1063/1.4848995⟩ |
| Popis: | International audience; We report on an adjustable interferometric set-up for Scanning Microwave Microscopy. This interferometer is designed in order to combine simplicity, a relatively flexible choice of the frequency of interference used for measurements as well as the choice of impedances range where the interference occurs. A vectorial calibration method based on a modified 1-port error model is also proposed. Calibrated measurements of capacitors have been obtained around the test frequency of 3.5 GHz down to about 0.1 fF. Comparison with standard vector network analyzer measurements is shown to assess the performance of the proposed system. |
| Databáze: | OpenAIRE |
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