Fabrication and Measurements of Inductive Devices for Scanning Microwave Microscopy
| Autor: | A. Buchter, Johannes Hoffmann, T. Le Quang, Denis Vasyukov, Markus Zeier |
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| Rok vydání: | 2020 |
| Předmět: |
010302 applied physics
Fabrication Materials science business.industry 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Microwave impedance microscope Calibration algorithm Inductance Scanning microwave microscope impedance standard 0103 physical sciences Microscopy Calibration Optoelectronics Nanoscale electrical measurement 0210 nano-technology business Microwave |
| Popis: | This article presents our results in fabrication and measurement of inductive devices for scanning microwave microscopy (SMM). Devices with resistance and inductance varying between 9\,$\Omega$-220\,$\Omega$ and up to 200\,pH were produced on SiN membrane using using clean room processes. Then, by combining actual SMM measurements performed for these devices and their simulation, we were able to test a calibration method which employs three known standards. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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