Micro-Scale Simulation of Impact Rupture in Polysilicon MEMS

Autor:	Biagio De Masi, Alberto Corigliano, F. Cacchione, Attilio Frangi
Rok vydání:	2006
Předmět:	Microelectromechanical systems Scale (ratio) Computer science Impact loading Mechanical engineering Voronoi diagram Mechanical reliability
Zdroj:	Fracture of Nano and Engineering Materials and Structures ISBN: 9781402049712 Scopus-Elsevier Politecnico di Milano-IRIS
Popis:	The issue of Micro Electro Mechanical Systems (MEMS) mechanical reliability is becoming increasingly important. This implies that sufficiently accurate methodologies to determine the mechanical response of MEMS subject to various loading conditions must be developed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ccccddb86e85f12a47a2361dda304f10 https://doi.org/10.1007/1-4020-4972-2_320 Zobrazit plný text záznamu