Pyroelectric thin-film sensor array
| Autor: | Nava Setter, Keith G. Brooks, M. Forster, Markus Kohli, Peter Ryser, C. Wuethrich, Paul Muralt, Bert Willing |
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| Předmět: |
Materials science
business.industry Thin film sensor Detector Metals and Alloys pyroelectric detectors thin-film sensors Condensed Matter Physics Ferroelectricity Surfaces Coatings and Films Electronic Optical and Magnetic Materials Pyroelectricity Membrane ferroelectric materials Optoelectronics sensor arrays Electrical and Electronic Engineering Current (fluid) business Instrumentation Frequency modulation devices detectors Voltage |
| Zdroj: | Scopus-Elsevier |
| Popis: | Pyroelectric thin-film point detectors and 1 x 12 arrays have been fabricated and characterized. They consist of sol-gel-deposited PZT thin-film elements on micromachined Si3N4/SiO2 membranes. The measured current and voltage response as a function of modulation frequency of a 1 x 12 array element is compared with finite-element calculations. Voltage responsivities of almost 3000 V W-1 in vacuum and 800 V W-1 in air have been achieved for 0.4 mm x 0.9 mm elements. Some point detectors have been completely packaged and correct operation in a movement detection system has been demonstrated. |
| Databáze: | OpenAIRE |
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