New techniques for laser micromachining MEMS devices
| Autor: | Karl L. Boehlen, Ric Allott, Bob Bann, Malcolm C. Gower, Charles E. Abbott, Ines Stassen Boehlen, Neil Sykes, Phil T. Rumsby |
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| Jazyk: | angličtina |
| Rok vydání: | 2002 |
| Předmět: |
Microelectromechanical systems
Materials science Fabrication business.industry ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION Nanotechnology Bow tie Laser Plasma display panel law.invention Surface micromachining law Optoelectronics Laser micromachining business Projection (set theory) Inkjet printer nozzle 621.3: Elektrotechnik und Elektronik |
| Popis: | Two new laser mask projection techniques Synchronized Image Scanning (SIS) and Bow Tie Scanning (BTS) have been developed for the efficient fabrication of dense arrays of repeating 3D microstructures on large area substrates. Details of these techniques are given and examples of key industrial applications are shown. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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