Comparison of lead zirconate titanate thin films on ruthenium oxide and platinum electrodes
| Autor: | Les A. Bursill, Dilip P. Vijay, Seshu B. Desu, Ian M. Reaney |
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| Přispěvatelé: | Materials Science and Engineering (MSE), Virginia Tech. Department of Materials Science and Engineering, Ecole PoIytechnique Federale de Lausanne. Laboratoire de Ceramique, MX-D |
| Rok vydání: | 1994 |
| Předmět: |
Materials science
Pyrochlore General Physics and Astronomy Nanotechnology engineering.material Ferroelectric thin films Lead zirconate titanate Microstructure Ruthenium oxide Nanocrystalline material chemistry.chemical_compound chemistry Transmission electron microscopy engineering Thin film Composite material Electrodes Layer (electronics) Thin film structure Microstructural properties |
| Zdroj: | Journal of Applied Physics. 75:1521-1525 |
| ISSN: | 1089-7550 0021-8979 |
| DOI: | 10.1063/1.356388 |
| Popis: | High-resolution and bright- and dark-field transmission electron microscopy are used to characterize and compare the interface structures and microstructure of PZT/RuO2/SiO2/Si and PZT/Pt/Ti/SiO2/Si ferroelectric thin films, with a view to understanding the improved fatigue characteristics of PZT thin films with RuO2 electrodes. The RuO2/PZT interface consists of a curved pseudoperiodic minimal surface. The interface is chemically sharp with virtually no intermixing of RuO2 and PZT, as evidenced by the atomic resolution images as well as energy dispersive x-ray analysis. A nanocrystalline pyrochlore phase Pb2ZrTiO7-x, x not equal 1, was found on the top surface of the PZT layer. The PZT/Pt/Ti/SiO2/Si thin film was well crystallized and showed sharp interfaces throughout. Possible reasons for the improved fatigue characteristics of PZT/RuO2/SiO2/Si thin films are discussed. Swiss National Funds for Research Australian Research Council |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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