High pulsed power VCSEL arrays with polymer microlenses formed by photoacid diffusion
| Autor: | Siew Li Tan, Jun Da Ng, Aaron J. Danner, Gianluca Grenci, Jia Jun Wong, Yong Keong Yap |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
Microlens
Materials science business.industry Beam steering 02 engineering and technology Pulsed power 021001 nanoscience & nanotechnology 01 natural sciences Atomic and Molecular Physics and Optics Radius of curvature (optics) law.invention Vertical-cavity surface-emitting laser 010309 optics Optics law 0103 physical sciences Astrophysics::Earth and Planetary Astrophysics Photolithography 0210 nano-technology business Electron-beam lithography Beam divergence |
| Zdroj: | Optics Express. 28:20095 |
| ISSN: | 1094-4087 |
| DOI: | 10.1364/oe.392660 |
| Popis: | We demonstrate millimeters-long VCSEL linear arrays with SU-8 epoxy-based microlenses that are directly patterned and cross-linked on the output apertures by a simple, photoacid-diffusion-aided photolithography technique. The linear arrays are capable of delivering >7 W of peak pulsed output power. By exploiting the photoacid diffusion effect, it is possible to produce a range of microlens structures with height and radius of curvature ranging from approximately ten to tens of microns. Simulation and experimental results show that the far-field beam divergence can be reduced by a factor of up to 7 in VCSELs integrated with optimal microlens dimensions. |
| Databáze: | OpenAIRE |
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