A low hydraulic capacitance pressure sensor for integration with a micro viscosity detector
| Autor: | Michael Curt Elwenspoek, A. van den Berg, R. Tijssen, F.H.J. van der Heyden, Marko Theodoor Blom, Johannes G.E. Gardeniers, E. Chmela |
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| Přispěvatelé: | Analytical Chemistry and Forensic Science (HIMS, FNWI), Faculty of Science and Technology, Mesoscale Chemical Systems |
| Rok vydání: | 2003 |
| Předmět: |
Wheatstone bridge
Chemistry Detector Metals and Alloys Analytical chemistry Viscometer Linearity METIS-213478 EWI-12294 Condensed Matter Physics Pressure sensor Capacitance Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention IR-45881 TST-FLUID HANDLING Viscosity Planar law Materials Chemistry Electrical and Electronic Engineering Composite material Instrumentation |
| Zdroj: | Sensors and Actuators. B, Chemical, 92, 102-109. Elsevier Sensors and actuators. B: Chemical, 92(1-2), 102-109. Elsevier |
| ISSN: | 0925-4005 |
| DOI: | 10.1016/s0925-4005(03)00099-6 |
| Popis: | A design is presented for a micromachined differential viscometer, that is suitable for integration into a planar hydrodynamic chromatography system (HDC) for polymer analysis. The viscometer consists of four equal flow restrictions and two pressure sensors, connected in a Wheatstone bridge configuration. Since this viscometer requires an ultra-low hydraulic capacitance differential pressure sensor, a pressure sensor is presented of which the internal volume displacement was reduced considerably compared to commercially available sensors. An optical method was used to detect membrane deflections with a magnitude of approximately 0.01 nm. This method lead to a linearity of 1% over the measured pressure range and a resolution of 2 Pa. With this pressure sensor integrated into the viscosity detector, viscosity measurements were performed on the viscosity difference of ethanol and water. |
| Databáze: | OpenAIRE |
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