Low dispersion integrated Michelson interferometer on silicon on insulator for optical coherence tomography
| Autor: | Gunay Yurtsever, Katarzyna Komorowska, Roel Baets |
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| Přispěvatelé: | Leitgeb, RA, Bouma, BE |
| Rok vydání: | 2011 |
| Předmět: |
Technology and Engineering
optical coherence tomography Silicon photonics Materials science silicon photonics integrated photonics Silicon business.industry Hybrid silicon laser Michelson interferometer Silicon on insulator chemistry.chemical_element law.invention WAVE-GUIDES Interferometry Optics chemistry law Astronomical interferometer Optoelectronics Photolithography business |
| Zdroj: | PROCEEDINGS OF SPIE, THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING |
| ISSN: | 0277-786X |
| DOI: | 10.1117/12.889920 |
| Popis: | We present an integrated silicon Michelson interferometer for OCT fabricated with wafer scale deep UV lithography. Silicon waveguides of the interferometer are designed with GVD less than 50 ps/nm. km. The footprint of the device is 0.5 mm x 3 mm. The effect of sidewall roughness of silicon waveguides has been observed, possible solutions are discussed. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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