Nitruration initiale par NH3 à basse température de Si(111) 1x1-H

Autor: J.E. Bonnet, C. Casado, J.P. Lacharme, C.A. Sébenne, M. Iqbal, N. Safta
Jazyk: francouzština
Rok vydání: 1994
Předmět:
Zdroj: Journal de Physique IV Proceedings
Journal de Physique IV Proceedings, EDP Sciences, 1994, 04 (C9), pp.C9-155-C9-158. ⟨10.1051/jp4:1994924⟩
ISSN: 1155-4339
1764-7177
DOI: 10.1051/jp4:1994924⟩
Popis: Silicon samples have been chemically treated in order to get a Si(111) 1 × 1: H surface under ultrahigh vacuum. This surface was exposed to doses of NH 3 in the 10 2 to 10 3 Langmuir range, either kept at room temperature or Joule-heated at 400° C. The Si 2p core level spectra were recorded upon synchrotron light beam excitation at a surface ― sensitive photon energy wavelength of 128 eV. The N 2s nitrogen peak binding energy at 20 eV was also recorded. While at room temperature the hydrogenated surface remained unperturbed whatever the dose of unexcited NH 3 , a reaction occurred as soon as the temperature reached about 400° C
Databáze: OpenAIRE