Tris(phosphino)borato Silver(I) Complexes as Precursors for Metallic Silver Aerosol-Assisted Chemical Vapor Deposition

Autor:	Matthew N. McCain, Michael R. Salata, Sven Schneider, Tobin J. Marks
Rok vydání:	2008
Předmět:	Thermogravimetric analysis Scanning electron microscope Chemistry Inorganic chemistry Chemical vapor deposition Island growth Inorganic Chemistry Metal X-ray photoelectron spectroscopy visual_art visual_art.visual_art_medium Crystallite Physical and Theoretical Chemistry Thin film
Zdroj:	Inorganic Chemistry. 47:2534-2542
ISSN:	1520-510X 0020-1669
DOI:	10.1021/ic701852x
Popis:	A series of light- and air-stable tris(phosphino)borato silver(I) complexes has been synthesized, structurally and spectroscopically characterized, and implemented in the growth of low resistivity metallic silver thin films by aerosol-assisted chemical vapor deposition (AACVD). Of the four complexes in the series, [RB(CH2PR'2) 3]AgPEt3 (R = Ph (1, 3), (n)Bu (2, 4); R' = Ph (1, 2), (i)Pr (3, 4), complexes 1 and 2 have been characterized by single-crystal X-ray diffraction. Complex 2 represents a significant improvement over previously available nonfluorinated Ag precursors, owing to ease of handling and efficient film deposition characteristics. Thermogravimetric analysis (TGA) shows that the thermolytic properties of these complexes can be significantly modified by altering the ligand structure. Polycrystalline cubic-phase Ag thin films were grown on glass, MgO(100), and 52100 steel substrates. Ag films of thicknesses 3 microm, grown at rates of 14-18 nm/min, exhibit low levels of extraneous element contamination by X-ray photoelectron spectroscopy (XPS). Atomic force microscopy (AFM) and scanning electron microscopy (SEM) indicate that film growth proceeds primarily via an island growth (Volmer-Weber) mechanism.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c9817644bcc146d2927d47a79f5f1c6f https://doi.org/10.1021/ic701852x Zobrazit plný text záznamu