Thin film pyroelectric arrays as infra-red detectors
| Autor: | Markus Kohli, Keith G. Brooks, Andreas Seifert, Bert Willing, Paul Muralt |
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| Předmět: |
Materials science
Silicon chemistry.chemical_element sensors pzt infra-red detectors law.invention Responsivity chemistry.chemical_compound law Materials Chemistry arrays Electrical and Electronic Engineering Thin film business.industry Doping Poling Condensed Matter Physics Electronic Optical and Magnetic Materials Pyroelectricity chemistry thin films Control and Systems Engineering ca-modified lead-titanate Ceramics and Composites Optoelectronics Lead titanate poling Photolithography business pyroelectricity |
| Popis: | Pyroelectric thin film 12-element linear arrays (element size 0.4x0.9 mm(2)) have been fabricated by standard photolithography techniques on silicon substrates. A voltage responsivity of almost 800 V/W in air and 3000 V/W in vacuum is measured at low frequencies (0.1-1 Hz). Measurements are compared to finite element simulations. Doping of lead titanate thin films have been studied. Incorporation of porosity and Ca-doping of lead titanate thin films was found to improve significantly the pyroelectric properties. 20% Ca doping increased p/epsilon to 3.3. Poling experiments with Zr doped lead titanate shows the necessity of high temperature poling to obtain high pyro-coefficients. |
| Databáze: | OpenAIRE |
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