Characterization of GaN grown on sapphire by laser-induced molecular beam epitaxy

Autor: M. Gross, Han Zhou, A. Rühm, N. Y. Jin-Phillipp, Fritz Phillipp, H. Schröder
Rok vydání: 2001
Předmět:
Zdroj: Journal of Materials Research. 16:261-267
ISSN: 2044-5326
0884-2914
DOI: 10.1557/jmr.2001.0039
Popis: GaN grown on sapphire (α–Al2O3) was characterized by laser-induced molecular beam epitaxy. Threading dislocations with Burgers vectors of 1/3〈1120〉, 1/3〈1123〉 and [0001] were observed with a predominance of the first type. Additionally, inversion domains with Ga-polarity existed with respect to the adjacent matrix, which was of N-polarity. The dislocation densities and coherence lengths were deduced from x-ray diffraction and found to be in accordance with those measured by transmission electron microscopy. Both displacement fringe contrast analysis and high-resolution transmission electron microscopy results indicated that the inversion domain boundaries had Ga–N bonds between domains and the adjacent matrix.
Databáze: OpenAIRE