X-ray mirror figure correction by differential deposition and off-line metrology
| Autor: | Christian Morawe, François Perrin, Raymond Barrett, Sylvain Labouré, A. Vivo, Jean Christophe Peffen |
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| Rok vydání: | 2019 |
| Předmět: |
0303 health sciences
Nuclear and High Energy Physics Radiation Materials science Aperture business.industry 030303 biophysics Context (language use) Sputter deposition 01 natural sciences Metrology 010309 optics 03 medical and health sciences Optics Surface metrology 0103 physical sciences Surface roughness Deposition (phase transition) business Instrumentation Layer (electronics) |
| Zdroj: | Journal of Synchrotron Radiation. 26:1872-1878 |
| ISSN: | 1600-5775 |
| DOI: | 10.1107/s1600577519012256 |
| Popis: | The surface figure error of a hard X-ray mirror was improved by combining differential deposition and off-line metrology tools. Thin Cr layers were deposited on flat substrates by DC magnetron sputtering. The substrates were moved in front of a beam-defining aperture. The required velocity profile was calculated using a deconvolution algorithm. The Cr thickness profiles were measured directly using hard X-ray reflectivity data. The surface figure was characterized using conventional visible-light metrology instrumentation (long trace profiler) before and after the deposition. The method converges quickly, and after two iterations the mirror surface figure had improved by a factor of 7. The surface roughness evolves with increasing Cr thickness and deteriorates the quality of subsequent multilayer coatings. The mirror curvature can change upon coating, which complicates the interpretation of the surface metrology data. In this context, the role of layer stress is discussed. Potential improvements of the process are also proposed. |
| Databáze: | OpenAIRE |
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