13.5 nm EUV generation from tin-doped droplets using a fiber laser
| Autor: | Simi George, Kazutoshi Takenoshita, Kai Chung Hou, Martin Richardson, Almantas Galvanauskas |
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| Rok vydání: | 2009 |
| Předmět: |
Distributed feedback laser
Materials science business.industry Extreme ultraviolet lithography Energy conversion efficiency technology industry and agriculture Physics::Optics Plasma Laser Atomic and Molecular Physics and Optics law.invention X-ray laser Optics law Fiber laser Optoelectronics Laser power scaling business |
| Zdroj: | Optics express. 15(25) |
| ISSN: | 1094-4087 |
| Popis: | A comprehensive study of the spectral and Mo-Si mirror inband EUV emission from tin-doped droplet laser plasma targets irradiated with a single 1064 nm beam from an Yb:doped fiber laser is reported.With pre-pulse enhancement, in-band conversion efficiency of approximately 2.1% is measured for laser irradiance intensities near 8 x 10(10) W/cm(2). This is the first study to be reported that uses a high-power, high repetition rate fiber laser with the high repetition rate droplet targets where EUV generation from plasmas is measured. |
| Databáze: | OpenAIRE |
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