Determination of Surface Temperature in ICP RF Plasma Treatments of Organic Materials
| Autor: | Paulo César Borges, Carlos Eduardo Farias, Euclides Alexandre Bernardelli, Marcio Mafra |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
Materials science
Analytical chemistry Extrapolation 02 engineering and technology 01 natural sciences Temperature measurement RF plasma treatment Thermal conductivity Thermocouple Phase (matter) 0103 physical sciences Thermal Temperature simulation General Materials Science Materials of engineering and construction. Mechanics of materials Plasma processing 010302 applied physics Mechanical Engineering Plasma 021001 nanoscience & nanotechnology Condensed Matter Physics Ultimate surface temperature Mechanics of Materials TA401-492 0210 nano-technology |
| Zdroj: | Materials Research, Vol 20, Iss 5, Pp 1432-1443 (2017) Materials Research v.20 n.5 2017 Materials research (São Carlos. Online) Universidade Federal de São Carlos (UFSCAR) instacron:ABM ABC ABPOL Materials Research, Volume: 20, Issue: 5, Pages: 1432-1443, Published: 10 AUG 2017 |
| ISSN: | 1980-5373 1516-1439 |
| DOI: | 10.1590/1980-5373-mr-2017-0238 |
| Popis: | The reactions that can occur on organic materials treated in plasma enviorement are strongly affected by surface temperature, thus the sharp determination of this variable is extremely important to process control. In situ temperature measurements are often employed; however, the measured point is generally under the treated surface. If in metallic materials the high thermal conductivity minimizes this problem, in non-metallic materials processing it becomes important, because its thermal resistivity besides a high sensibility to small temperature variations. The present work uses a simulation tool to extract thermal data on Ar+O2 RF plasma processing of Stearic Acid. Experimental data were obtained by thermocouples placed inside the samples. The extrapolation of surface temperature was performed by numerical simulation with Autodesk CFD software v.15.1. Results show that the temperature of the surface reaches values higher than the ones measured inside the sample holder. This difference of temperature is in good agreement with the visual observation of the phase transformations in the treated material, showing a simple and valuable tool to better control of plasma treatments. |
| Databáze: | OpenAIRE |
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