| Autor: |
Anton V. Nisan, Anastasia Ivanova, Konstantin Oblov, Nikolay Samotaev, Gleb N. Potapov, Alexey Vasiliev |
| Jazyk: |
angličtina |
| Rok vydání: |
2017 |
| Předmět: |
|
| Zdroj: |
Proceedings, Vol 1, Iss 4, p 324 (2017) |
| ISSN: |
2504-3900 |
| Popis: |
The application of thin LTCC is a very interesting and promising approach to the fabrication of ceramic MEMS gas sensors. The attempts to use this material were restricted till now by the thickness of commercial material (>50 μm). In this work, we found a possibility to fabricate thin LTCC membranes (20–30 μm) stretched on a frame made of 100 μm thick LTCC. Aerosol jet printed Pt microheater and laser cutting of the membrane gave a cantilever shaped microhotplate with hot spot of about 300 × 300 μm. Power consumption of the heater is ~150 mW at 450 °C. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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