A 5.3 GHz Al0.76Sc0.24N Two-Dimensional Resonant Rods Resonator with a kt2 of 23.9%
| Autor: | Xuanyi Zhao, Onurcan Kaya, Michele Pirro, Meruyert Assylbekova, Luca Colombo, Pietro Simeoni, Cristian Cassella |
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| Rok vydání: | 2022 |
| Předmět: | |
| DOI: | 10.48550/arxiv.2202.11284 |
| Popis: | This work reports on the measured performance of an Aluminum Scandium Nitride (AlScN) Two-Dimensional Resonant Rods resonator (2DRR), fabricated by using a Sc-doping concentration of 24%, characterized by a low off-resonance impedance (~25 Ohm) and exhibiting a record electromechanical coupling coefficient (kt2) of 23.9% for AlScN resonators. In order to achieve such performance, we identified and relied on optimized deposition and etching processes for highly-doped AlScN films, aiming at achieving high crystalline quality, low density of abnormally oriented grains in the 2DRR's active region and sharp lateral sidewalls. Also, the 2DRR's unit-cell has been acoustically engineered to maximize the piezo-generated mechanical energy within each rod and to ensure a low transduction of spurious modes around resonance. Due to its unprecedented kt2, the reported 2DRR opens exciting scenarios towards the development of next generation monolithic integrated radio-frequency (RF) filtering components. In fact, we show that 5th-order 2DRR-based ladder filters with fractional bandwidths (BW) of ~11%, insertion-loss (I.L) values of ~2.5 dB and with >30 dB out-of-band rejections can now be envisioned, paving an unprecedented path towards the development of ultra-wide band (UWB) filters for next-generation Super-High-Frequency (SHF) radio front-ends. 10 pages, 11 figures, 5 tables, submitted to JMEMS |
| Databáze: | OpenAIRE |
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