Characterization of nanoporous alumina using terahertz reflectometry and scattering imaging

Autor:	Mi Jung, Min Zhai, Alexandre Locquet, Deok Ha Woo, David S. Citrin
Přispěvatelé:	Georgia Tech Lorraine [Metz], Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-Georgia Institute of Technology [Atlanta]-CentraleSupélec-Ecole Nationale Supérieure des Arts et Metiers Metz-Centre National de la Recherche Scientifique (CNRS)
Rok vydání:	2021
Předmět:	[SPI]Engineering Sciences [physics] Materials science Nanoporous Scattering business.industry Terahertz radiation Field emission scanning electron microscopy Scanning electron microscope Optoelectronics Specular reflection Reflectometry business Characterization (materials science)
Zdroj:	2021 46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz) 2021 46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz), Aug 2021, Chengdu, China. ⟨10.1109/IRMMW-THz50926.2021.9567113⟩
DOI:	10.1109/irmmw-thz50926.2021.9567113
Popis:	International audience; The structure as well as morphology of nanoporous alumina (NP Al2O3) films on Al substrates are investigated by terahertz (THz) reflectometry and scattering imaging. An inhomogeneous area is identified in THz C-scan results off specular conditions at various angles. The thickness of NP Al2O3 films calculated based on THz results is in excellent agreement with destructive cross-sectional field emission scanning electron microscopy (FE-SEM) measurements.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c8144bf4d223c5afdb24a1731846cc9e https://doi.org/10.1109/irmmw-thz50926.2021.9567113 Zobrazit plný text záznamu