Cavity-hollow cathode-sputtering source for titanium films
| Autor: | I. Vojvodic, C. Maszl, G. B. Rusu, Roman Schrittwieser, A. Murawski, Paul Scheier, Claire Douat, S. Jaksch, Mihai Asandulesa, Codrina Ionita, Marius Dobromir, A. V. Nastuta, Dumitru Luca, S. Olenici |
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| Přispěvatelé: | 'Petru Poni' Institute of Macromolecular Chemistry, Université Paris-Sud - Paris 11 (UP11), 'Alexandru Ioan Cuza' University of Iasi - Faculty of Physics, Department of Plasma Physics, Optics and Spectroscopy and Structure of Matter, Institut für Ionenphysik und Angewandte Physik - Institute for Ion Physics and Applied Physics [Innsbruck], Leopold Franzens Universität Innsbruck - University of Innsbruck |
| Rok vydání: | 2010 |
| Předmět: |
010302 applied physics
Physics Argon chemistry.chemical_element Condensed Matter Physics 01 natural sciences 7. Clean energy Space charge Cathode 010305 fluids & plasmas law.invention X-ray photoelectron spectroscopy chemistry Highly oriented pyrolytic graphite [PHYS.PHYS.PHYS-PLASM-PH]Physics [physics]/Physics [physics]/Plasma Physics [physics.plasm-ph] Sputtering law 0103 physical sciences Atomic physics Thin film Composite material ComputingMilieux_MISCELLANEOUS Titanium |
| Zdroj: | Journal of Plasma Physics Journal of Plasma Physics, Cambridge University Press (CUP), 2010, 76 (3-4), ⟨10.1017/S0022377809990900⟩ |
| ISSN: | 1469-7807 0022-3778 |
| DOI: | 10.1017/s0022377809990900 |
| Popis: | A cavity-hollow cathode was investigated as low-cost sputtering source for titanium. An argon discharge is produced inside a hollow cathode consisting of two specifically formed disks of titanium. An additional cavity further enhances the pendulum effect of the electrons. Measurements with small Langmuir probes yielded evidence for the formation of a space charge double layer above the cathode. The sputtered atoms form negatively charged clusters. After further acceleration by the double layer the clusters impinge on the substrates. Titanium thin films were produced on highly oriented pyrolytic graphite. The films were investigated by a scanning tunnel microscope and X-ray photoelectron spectroscopy. |
| Databáze: | OpenAIRE |
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