Parallel-plate wet denuder coupled ion chromatograph for near-real-time detection of trace acidic gases in clean room air
| Autor: | Masaki Takeuchi, Hideji Tanaka, Hiromichi Tsunoda, Yoshimi Shiramizu |
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| Rok vydání: | 2011 |
| Předmět: |
Analyte
Chromatography Chromatography Gas Formates Chemistry Air Ion chromatography Analytical chemistry Nitrous Acid Contamination Parallel plate Nitric Acid Analytical Chemistry Volumetric flow rate Chromatographic separation Room air distribution Wettability Sulfur Dioxide Gases Hydrochloric Acid Rapid response Acetic Acid |
| Zdroj: | Analytical sciences : the international journal of the Japan Society for Analytical Chemistry. 27(8) |
| ISSN: | 1348-2246 |
| Popis: | This paper describes the performance of our automated acidic (CH(3)COOH, HCOOH, HCl, HNO(2), SO(2), and HNO(3)) gases monitor utilizing a parallel-plate wet denuder (PPWD). The PPWD quantitatively collects gaseous contaminants at a high sample flow rate (∼8 dm(3) min(-1)) compared to the conventional methods used in a clean room. Rapid response to any variability in the sample concentration enables near-real-time monitoring. In the developed monitor, the analyte collected with the PPWD is pumped into one of two preconcentration columns for 15 min, and determined by means of ion chromatography. While one preconcentration column is used for chromatographic separation, the other is used for loading the sample solution. The system allows continuous monitoring of the common acidic gases in an advanced semiconductor manufacturing clean room. |
| Databáze: | OpenAIRE |
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