Structure, Oxidation Resistance, Mechanical, and Tribological Properties of N- and C-Doped Ta-Zr-Si-B Hard Protective Coatings Obtained by Reactive D.C. Magnetron Sputtering of TaZrSiB Ceramic Cathode

Autor: A. D. Sytchenko, Stepan Vorotilo, V. Yu. Lopatin, V.V. Klechkovskaya, E. A. Levashov, Ph. V. Kiryukhantsev-Korneev
Jazyk: angličtina
Rok vydání: 2020
Předmět:
Zdroj: Coatings, Vol 10, Iss 946, p 946 (2020)
Coatings
Volume 10
Issue 10
ISSN: 2079-6412
Popis: Coatings in the Ta-Zr-Si-B-C-N system were produced by magnetron sputtering of a TaSi2-Ta3B4-(Ta,Zr)B2 ceramic target in the Ar medium and Ar-N2 and Ar-C2H4 gas mixtures. The structure and composition of coatings were studied using scanning electron microscopy, glow discharge optical emission spectroscopy, energy-dispersion spectroscopy, and X-ray diffraction. Mechanical and tribological properties of coatings were determined using nanoindentation and pin-on-disk tests using 100Cr6 and Al2O3 balls. The oxidation resistance of coatings was evaluated by microscopy and X-ray diffraction after annealing in air at temperatures up to 1200 °
C. The reactively-deposited coatings containing from 30% to 40% nitrogen or carbon have the highest hardness up to 29 GPa and elastic recovery up to 78%. Additionally, coatings with a high carbon content demonstrated a low coefficient of friction of 0.2 and no visible signs of wear when tested against 100Cr6 ball. All coatings except for the non-reactive ones can resist oxidation up to a temperature of 1200 °
C thanks to the formation of a protective film based on Ta2O5 and SiO2 on their surface. Coatings deposited in Ar-N2 and Ar-C2H4 demonstrated superior resistance to thermal cycling in conditions 20-T&minus
20 °
C (where T = 200&ndash
1000 °
C). The present article compares the structure and properties of reactive and &ldquo
standard-inert atmosphere&rdquo
deposited coatings to develop recommendations for optimizing the composition.
Databáze: OpenAIRE