Structure, Oxidation Resistance, Mechanical, and Tribological Properties of N- and C-Doped Ta-Zr-Si-B Hard Protective Coatings Obtained by Reactive D.C. Magnetron Sputtering of TaZrSiB Ceramic Cathode
Autor: | A. D. Sytchenko, Stepan Vorotilo, V. Yu. Lopatin, V.V. Klechkovskaya, E. A. Levashov, Ph. V. Kiryukhantsev-Korneev |
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Jazyk: | angličtina |
Rok vydání: | 2020 |
Předmět: |
oxidation resistance
Materials science Scanning electron microscope Annealing (metallurgy) nitrogen and ethylene chemistry.chemical_element Ta3B4 and ZrB2 02 engineering and technology Temperature cycling 01 natural sciences composition and structure law.invention law 0103 physical sciences SHS and hot pressing Materials Chemistry Ceramic Composite material friction coefficient and wear resistance 010302 applied physics Argon reactive magnetron sputtering hardness and elastic modulus Surfaces and Interfaces Sputter deposition Nanoindentation 021001 nanoscience & nanotechnology Cathode Surfaces Coatings and Films chemistry lcsh:TA1-2040 visual_art argon visual_art.visual_art_medium TaSi2 0210 nano-technology lcsh:Engineering (General). Civil engineering (General) |
Zdroj: | Coatings, Vol 10, Iss 946, p 946 (2020) Coatings Volume 10 Issue 10 |
ISSN: | 2079-6412 |
Popis: | Coatings in the Ta-Zr-Si-B-C-N system were produced by magnetron sputtering of a TaSi2-Ta3B4-(Ta,Zr)B2 ceramic target in the Ar medium and Ar-N2 and Ar-C2H4 gas mixtures. The structure and composition of coatings were studied using scanning electron microscopy, glow discharge optical emission spectroscopy, energy-dispersion spectroscopy, and X-ray diffraction. Mechanical and tribological properties of coatings were determined using nanoindentation and pin-on-disk tests using 100Cr6 and Al2O3 balls. The oxidation resistance of coatings was evaluated by microscopy and X-ray diffraction after annealing in air at temperatures up to 1200 ° C. The reactively-deposited coatings containing from 30% to 40% nitrogen or carbon have the highest hardness up to 29 GPa and elastic recovery up to 78%. Additionally, coatings with a high carbon content demonstrated a low coefficient of friction of 0.2 and no visible signs of wear when tested against 100Cr6 ball. All coatings except for the non-reactive ones can resist oxidation up to a temperature of 1200 ° C thanks to the formation of a protective film based on Ta2O5 and SiO2 on their surface. Coatings deposited in Ar-N2 and Ar-C2H4 demonstrated superior resistance to thermal cycling in conditions 20-T&minus 20 ° C (where T = 200&ndash 1000 ° C). The present article compares the structure and properties of reactive and &ldquo standard-inert atmosphere&rdquo deposited coatings to develop recommendations for optimizing the composition. |
Databáze: | OpenAIRE |
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