Graded reflectivity micromirror arrays

Autor: P. Cusumano, Angelo Mangione, C. Arnone, Giuseppe Lullo
Rok vydání: 2002
Předmět:
Zdroj: Applied Optics. 41:143
ISSN: 1539-4522
0003-6935
DOI: 10.1364/ao.41.000143
Popis: A technique for fabricating arrays of graded reflectivity micromirrors with diameters as small as 25 microm is reported. It is based on laser-induced physical vapor deposition through microholes on a thin free-standing noncontact mask, and it is suitable for applications in micro-optics and solid-state laser technology.
Databáze: OpenAIRE