Graded reflectivity micromirror arrays
Autor: | P. Cusumano, Angelo Mangione, C. Arnone, Giuseppe Lullo |
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Rok vydání: | 2002 |
Předmět: | |
Zdroj: | Applied Optics. 41:143 |
ISSN: | 1539-4522 0003-6935 |
DOI: | 10.1364/ao.41.000143 |
Popis: | A technique for fabricating arrays of graded reflectivity micromirrors with diameters as small as 25 microm is reported. It is based on laser-induced physical vapor deposition through microholes on a thin free-standing noncontact mask, and it is suitable for applications in micro-optics and solid-state laser technology. |
Databáze: | OpenAIRE |
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