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The authors wish to thank Universiti Malaysia Perlis (UniMAP), Ministry of Science, Technology & Innovation (MOSTI) and Ministry of Higher Education for giving the opportunities to do this research in the Micro & Nano Fabrication Cleanroom. The appreciation also goes to all the team members in the Institute of Nanoelectronics Engineering especially in the Nano Biochip Research Group. Biographical notes: Uda Hashim received his PhD in Microelectronic from Universiti Kebangsaan Malaysia (UKM) in 2000. He is a Professor and Director of the Institute of Nano Electronic Engineering in Universiti Malaysia Perlis (UniMAP), Malaysia. He is the core researcher of microelectronics & nanotechnology cluster and also the team leader in the UniMAP Nano-Biochip Research Group. His current research interest includes Research Managements, Nanoelectronics, Biochips, E-Beam Lithography, Photolithography, Nano-structure formation, Semiconductor processing, CMOS process and devices. He has produced more than 100 academic papers in journals as well as conference proceedings worldwide in nanotechnology especially in nanoelectronics related field of research. |
