Design and Analysis of the Elastic-Beam Delaying Mechanism in a Micro-Electro-Mechanical Systems Device
| Autor: | Lu Zhang, Wang Fufu, Long Li, Zhihong Qiao, Qian Cao |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Microelectromechanical systems safety and arming system Elastic beam Computer science lcsh:Mechanical engineering and machinery Mechanical Engineering delaying mechanism Mechanical engineering 02 engineering and technology Solver 021001 nanoscience & nanotechnology 01 natural sciences Finite element method Article Mechanism (engineering) micro-electro-mechanical systems (MEMS) Control and Systems Engineering 0103 physical sciences Ansys software lcsh:TJ1-1570 Electrical and Electronic Engineering 0210 nano-technology |
| Zdroj: | Micromachines Volume 9 Issue 11 Micromachines, Vol 9, Iss 11, p 567 (2018) |
| ISSN: | 2072-666X |
| Popis: | The delaying mechanism is an important part of micro-electro-mechanical systems (MEMS) devices. However, very few mechanical delaying mechanisms are available. In this paper, an elastic-beam delaying mechanism has been proposed innovatively through establishing a three-dimensional model of an elastic-beam delay mechanism, establishing the force and the parameters of an elastic-beam delay mechanism, deriving the mathematical model according to the rigid dynamic mechanics theory, establishing the finite element model by using Ls-dyna solver of the Ansys software, and carrying out the centrifugal test. Simulation and test results match theoretical results quite well. It is believed that the elastic-beam delaying mechanism is quite effective and useful to slow the speed of the movable part in MEMS devices. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|