Multifunctional Ion-Sensitive Floating Gate Fin Field-Effect Transistor with Three-Dimensional Nanoseaweed Structure by Glancing Angle Deposition Technology
| Autor: | Po-Hung Tan, Chrong Jung Lin, Yi-Jen Yu, Yi Chung Wang, Yu-Lun Chueh, Ying-Chun Shen, Chien-Ping Wang, Tsung-Yu Chiang, Ya-Chin King, Shu-Chi Wu, Jiaw-Ren Shih, Yue-Der Chih, Kun-Lin Liou, Tzu-Yi Yang, Jonathan Chang |
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| Rok vydání: | 2021 |
| Předmět: |
Ions
Technology Materials science Hydrogen Pixel Transistors Electronic business.industry Sodium Transistor chemistry.chemical_element General Chemistry Biosensing Techniques law.invention Fin (extended surface) Ion Biomaterials chemistry law Optoelectronics General Materials Science business Sensitivity (electronics) Biotechnology Electronic circuit |
| Zdroj: | Small (Weinheim an der Bergstrasse, Germany). 18(5) |
| ISSN: | 1613-6829 |
| Popis: | A multifunctional ion-sensitive floating gate Fin field-effect transistor (ISFGFinFET) for hydrogen and sodium detection is demonstrated. The ISFGFinFET comprises a FGFET and a sensing film, both of which are used to detect and improve sensitivity. The sensitivity of the ISFGFinFET can be adjusted by modulating the coupling effect of the FG. A nanoseaweed structure is fabricated via glancing angle deposition (GLAD) technology to obtain a large sensing area to enhance the sensitivity for hydrogen ion detection. A sensitivity of 266 mV per pH can be obtained using a surface area of 3.28 mm2 . In terms of sodium ion detection, a calix[4]arene sensing film to monitor sodium ions, obtaining a Na+ sensitivity of 432.7 mV per pNa, is used. In addition, the ISFGFinFET demonstrates the functionality of multiple ions detection simultaneously. The sensor arrays composed of 3 × 3 pixels are demonstrated, each of which comprise of an FGFET sensor and a transistor. Furthermore, 16 × 16 arrays with a decoder and other peripheral circuits are constructed and simulated. The performance of the proposed ISFGFinFET is competitive with that of other state-of-the-art ion sensors. |
| Databáze: | OpenAIRE |
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