A 3D LTCC-Based Ceramic Microfluidic System with RF Dielectric Heating of Liquids
| Autor: | Darko Belavic, Kostja Makarovic, Barbara Malič, Matjaž Vidmar |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
Technology
Materials science Fabrication LTCC Microfluidics microfluidics Article RF dielectric heating Dielectric heating Miniaturization General Materials Science Ceramic Microscopy QC120-168.85 business.industry QH201-278.5 Engineering (General). Civil engineering (General) ceramic microsystem TK1-9971 udc:666 Descriptive and experimental mechanics Volume (thermodynamics) visual_art Electrode visual_art.visual_art_medium Optoelectronics Millimeter Electrical engineering. Electronics. Nuclear engineering TA1-2040 business |
| Zdroj: | Materials; Volume 14; Issue 23; Pages: 7396 Materials Materials, vol. 14, no. 23, 7396, 2021. Materials, Vol 14, Iss 7396, p 7396 (2021) |
| ISSN: | 1996-1944 |
| DOI: | 10.3390/ma14237396 |
| Popis: | The design, fabrication and functional evaluation of the radio-frequency dielectric heating of liquids in an LTCC-based ceramic microfluidic system are described and discussed. The device, which relies on the dielectric heating of liquids, was fabricated using a low temperature co-fired ceramic (LTCC) technology. A multilayered ceramic structure with integrated electrodes, buried channels and cavities in micro and millimetre scales was fabricated. The structure with the dimensions of 35 mm × 22 mm × 2.4 mm includes a buried cavity with a diameter of 17.3 mm and a volume of 0.3 mL. The top and bottom faces of the cavity consist of silver/palladium electrodes protected with 100 μm thick layers of LTCC. The power, used to heat a polar liquid (water) in the cavity with the volume of 0.3 mL, ranges from 5 to 40 W. This novel application of RF dielectric heating could enable the miniaturization of microfluidic systems in many applications. The working principle of such a device and its efficiency are demonstrated using water as the heated medium. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
| Nepřihlášeným uživatelům se plný text nezobrazuje | K zobrazení výsledku je třeba se přihlásit. |