Reduction of Liquid Bridge Force for 3D Microstructure Measurements
| Autor: | Mitsuyoshi Fukuda, Takao Sajima, Hiroshi Murakami, Akio Katsuki |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Předmět: |
surface force
van der Waals force electrostatic force liquid bridge force microstructure measurement optical fiber probe laser diode coordinate measuring machine (CMM) 0209 industrial biotechnology Materials science Electrostatic force microscope 02 engineering and technology 01 natural sciences lcsh:Technology 010309 optics lcsh:Chemistry symbols.namesake 020901 industrial engineering & automation Optics 0103 physical sciences General Materials Science Instrumentation lcsh:QH301-705.5 Fluid Flow and Transfer Processes Kelvin probe force microscope business.industry lcsh:T Process Chemistry and Technology Surface force General Engineering Adhesion lcsh:QC1-999 Computer Science Applications Chemical force microscopy lcsh:Biology (General) lcsh:QD1-999 lcsh:TA1-2040 symbols business Stylus lcsh:Engineering (General). Civil engineering (General) Non-contact atomic force microscopy lcsh:Physics |
| Zdroj: | Applied Sciences, Vol 6, Iss 5, p 153 (2016) Applied Sciences; Volume 6; Issue 5; Pages: 153 |
| ISSN: | 2076-3417 |
| Popis: | Recent years have witnessed an increased demand for a method for precise measurement of the microstructures of mechanical microparts, microelectromechanical systems, micromolds, optical devices, microholes, etc. This paper presents a measurement system for three-dimensional (3D) microstructures that use an optical fiber probe. This probe consists of a stylus shaft with a diameter of 2.5 µm and a glass ball with a diameter of 5 µm attached to the stylus tip. In this study, the measurement system, placed in a vacuum vessel, is constructed suitably to prevent adhesion of the stylus tip to the measured surface caused by the surface force resulting from the van der Waals force, electrostatic force, and liquid bridge force. First, these surface forces are analyzed with the aim of investigating the causes of adhesion. Subsequently, the effects of pressure inside the vacuum vessel on surface forces are evaluated. As a result, it is found that the surface force is 0.13 µN when the pressure inside the vacuum vessel is 350 Pa. This effect is equivalent to a 60% reduction in the surface force in the atmosphere. |
| Databáze: | OpenAIRE |
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