PERFORMANCE ANALYSIS OF MEMS MICROHEATER BYOPTIMIZING COIL DESIGN USING COVENTORWARE
| Autor: | Gauri M Dalvi, P. V. Kasambe, Samiksha R Gupta, Karan S Shah, Surendra S. Rathod |
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| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Předmět: |
Microelectromechanical systems
Microheater Materials science mems microheater business.industry lcsh:Mechanical engineering and machinery coventor ware gas detection Electromagnetic coil Optoelectronics lcsh:TJ1-1570 lcsh:Electrical engineering. Electronics. Nuclear engineering business lcsh:TK1-9971 |
| Zdroj: | Journal of Research in Engineering and Applied Sciences, Vol 1, Iss 3, Pp 135-140 (2016) |
| ISSN: | 2456-6403 |
| Popis: | Scaling in VLSI technology is being widely practiced in almost every chip design step. This approach of scaling down things has now found its way in the field of Sensors and actuators which lead to a new path of study viz MEMS (Micro-Electro Mechanical System). There are several studies published in the literature which primarily focuses on the design aspect of MEMS sensors; however continuous research is still going on for the perfect sensor structure related for desired application. Microheater is one of the popular MEMS structures that has found its usage in many applications with the most popular being detection of various gases for using higher sensitive detection mechanism at elevated temperature. This paper focuses on design of microheater for various coil structures with CoventorWare. Heating coil being primary element in the microheater, we in this research work have analyzed microheater performance with different coil designs for various materials. The temperature profile of heater coil is studied for different bias voltages. Also for the simulative analysis of heater coil we present a suitable meshing style with appropriate element size for accurate Finite Element Method using CoventorWare. |
| Databáze: | OpenAIRE |
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