Microfabrication of surface acoustic wave devices with AlN thin film deposited on half‐inch quartz wafer

Autor:	Asahi Nagano, Kanato Kitamura, Shuichi Noda, Sunao Murakami, Kohei Iguchi, Sommawan Khumpuang, Shiro Hara
Rok vydání:	2022
Předmět:	Mechanical Engineering Energy Engineering and Power Technology Electrical and Electronic Engineering
Zdroj:	Electrical Engineering in Japan. 215
ISSN:	1520-6416 0424-7760
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c4d468dbff84e152010a1a0107472828 https://doi.org/10.1002/eej.23412 Zobrazit plný text záznamu Plný text