Thin-Film Microtensile-Test Structures for High-Throughput Characterization of Mechanical Properties
| Autor: | Alfred Ludwig, Viswanadh Gowtham Arigela, Gerhard Dehm, Tobias Oellers, Christoph Kirchlechner |
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| Rok vydání: | 2020 |
| Předmět: |
Fabrication
Unary operation Molecular Structure 010405 organic chemistry Chemistry Surface Properties Nanotechnology General Chemistry General Medicine 010402 general chemistry 01 natural sciences 0104 chemical sciences Characterization (materials science) High-Throughput Screening Assays Small Molecule Libraries Physical vapor deposition Scalability Mechanical Tests Combinatorial Chemistry Techniques Stress Mechanical Thin film Particle Size Throughput (business) |
| Zdroj: | ACS Combinatorial Science |
| ISSN: | 2156-8952 |
| DOI: | 10.1021/acscombsci.9b00182 |
| Popis: | A photolithographic process for the rapid fabrication of thin-film tensile-test structures is presented. The process is applicable to various physical vapor deposition techniques and can be used for the combinatorial fabrication of thin-film tensile-test structure materials libraries for the high-throughput characterization of mechanical properties. The functionality of the fabrication process and the feasibility of performing high-quality measurements with these structures are demonstrated with Cu tensile-test structures. In addition, the scalability from unary structures to libraries with compositional variations is demonstrated. |
| Databáze: | OpenAIRE |
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